CVD rotary furnace
Customizable
CVD rotary furnace
A CVD rotary furnace is a high-temperature device that deposits coatings on the surface of powders or substrates through gas-phase chemical reactions. Combining dynamic rotational heating with precise atmosphere control, it is widely used in the preparation of high-performance materials in fields such as new energy, semiconductors, and powder metallurgy.
electric heating
Inclined rotary furnace tube
Flexible Atmosphere Control
Module intelligence
Product Details and Application Scenarios
A CVD rotary furnace is a high-temperature device that deposits coatings on the surface of powders or substrates through gas-phase chemical reactions. Combining dynamic rotational heating with precise atmosphere control, it is widely used in the preparation of high-performance materials in fields such as new energy, semiconductors, and powder metallurgy.
- Inclined rotary furnace tubes (stainless steel/quartz/corundum), dynamic sintering, uniform material reaction.
- Electric heating method (resistance wire/silicon carbide rod), multi-temperature zone design, more precise temperature control.
- Flexible atmosphere control (e.g., nitrogen, silane, acetylene, etc.) to adapt to different material requirements.
- The modular design features a slightly positive pressure inside the furnace tubes and is equipped with a mechanical pressure relief valve, ensuring a high safety factor.
Technical Specifications
| 参数项目 | 规格数据 |
|---|---|
|
highest temperature
|
1500℃ |
|
Temperature control accuracy
|
±1℃ |
|
heating element
|
Resistance wire/silicon carbide rod |
|
Furnace tube speed
|
0.5-8rpm Optional |
|
Production methods
|
Experimental/Intermittent |